@conference{aufsatz44247,
    affiliation = {Professur für Halbleitertechnik},
    title = {In-situ analysis of Al2O3 ALD growth on PET and PEN substrates for flexible organic electronics},
    journal = {12th International Conference on Atomic Layer Deposition AVS-ALD & Baltic ALD 2012: June 18 – 20, 2012, Dresden, Germany.},
    keywords = {-},
    year = {2012},
    peerreview = {Nein},
    openaccess = {Nein},
    volume = {Vortrag},
    author = {Geidel, M. and Hossbach, C. and Knaut, M. and Albert, M. and Bartha, J.W.}
}