@conference{aufsatz44363,
    affiliation = {Professur für Halbleitertechnik},
    title = {Atomic layer deposition monitored and characterized by joint in situ real-time spectroscopic ellipsometry and direct surface analysis},
    journal = {AVS 59th Annual International Symposium and Exhibition : October 28 – November 02, 2012, Tampa, Florida, USA. Tampa, Florida, 2012},
    keywords = {-},
    year = {2012},
    peerreview = {Nein},
    openaccess = {Nein},
    volume = {Vortrag},
    author = {Junige, M. and Geidel, M. and Knaut, M. and Albert, M. and Bartha, J.W.}
}