@conference{aufsatz44364,
affiliation = {Professur für Halbleitertechnik},
title = {Basic investigations of ruthenium’s ALD growth initiation},
journal = {AVS 12th International Conference on Atomic Layer Deposition : June 17 – 20, 2012, Dresden, Germany. Dresden, 2012},
keywords = {-},
year = {2012},
peerreview = {Nein},
openaccess = {Nein},
volume = {Poster},
author = {Junige, M. and Geidel, M. and Knaut, M. and Albert, M. and Bartha, J.W.}
}