@conference{aufsatz44364,
    affiliation = {Professur für Halbleitertechnik},
    title = {Basic investigations of ruthenium’s ALD growth initiation},
    journal = {AVS 12th International Conference on Atomic Layer Deposition : June 17 – 20, 2012, Dresden, Germany. Dresden, 2012},
    keywords = {-},
    year = {2012},
    peerreview = {Nein},
    openaccess = {Nein},
    volume = {Poster},
    author = {Junige, M. and Geidel, M. and Knaut, M. and Albert, M. and Bartha, J.W.}
}