@conference{aufsatz44365,
affiliation = {Professur für Halbleitertechnik},
title = {Opportunities and challenges of ellipsometry for process monitoring in atomic layer deposition},
journal = {7th Workshop Ellipsometry : March 05-07, 2012 Leipzig, Germany. Leipzig, 2012},
keywords = {-},
year = {2012},
peerreview = {Nein},
openaccess = {Nein},
volume = {Vortrag und Poster},
author = {Junige, M. and Albert, M. and Bartha, J.W.}
}