BibTex - Publikationen
@conference{aufsatz44365,
    affiliation = {Professur für Halbleitertechnik},
    title = {Opportunities and challenges of ellipsometry for process monitoring in atomic layer deposition},
    journal = {7th Workshop Ellipsometry : March 05-07, 2012 Leipzig, Germany. Leipzig, 2012},
    keywords = {-},
    year = {2012},
    peerreview = {Nein},
    openaccess = {Nein},
    volume = {Vortrag und Poster},
    author = {Junige, M. and Albert, M. and Bartha, J.W.}
}