BibTex - Publikationen
@conference{aufsatz44382,
    affiliation = {Professur für Halbleitertechnik},
    title = {High Rate PECVD Deposition of Silicon Thin Films at Very High Excitation Frequencies (81.36-140 MHz)},
    journal = {Proceedings of 27th European Photovoltaic Solar Energy Conference and Exhibition 2012},
    keywords = {-},
    pages = {2507--2510},
    year = {2012},
    peerreview = {Ja},
    openaccess = {Nein},
    author = {Leszczynska, B. and Strobel, C. and Albert, M. and Bartha, J.W. and Kuske, J.}
}