@conference{aufsatz44382,
affiliation = {Professur für Halbleitertechnik},
title = {High Rate PECVD Deposition of Silicon Thin Films at Very High Excitation Frequencies (81.36-140 MHz)},
journal = {Proceedings of 27th European Photovoltaic Solar Energy Conference and Exhibition 2012},
keywords = {-},
pages = {2507--2510},
year = {2012},
peerreview = {Ja},
openaccess = {Nein},
author = {Leszczynska, B. and Strobel, C. and Albert, M. and Bartha, J.W. and Kuske, J.}
}