@article{aufsatz44722,
    affiliation = {Professur für Mikrosystemtechnik},
    title = {Geometrical Properties of Multilayer Nano-Imprint-Lithography Molds for Optical Applications},
    journal = {Microelectronic Engineering},
    keywords = {-},
    pages = {284--287},
    year = {2012},
    peerreview = {Ja},
    openaccess = {Nein},
    volume = {98},
    author = {Finn, A. and Hensel, R. and Hagemann, F. and Kirchner, R. and Jahn, A. and Fischer, W.-J.}
}