@conference{aufsatz44723,
    affiliation = {Professur für Mikrosystemtechnik},
    title = {Polymer Structures with Undercuts by Reverse Imprint Lithography},
    journal = {Proc. 38th Int. Conf. on Micro and Nano Engineering 2012 (MNE 2012)},
    keywords = {-},
    year = {2012},
    peerreview = {Nein},
    openaccess = {Nein},
    author = {Finn, A. and Hensel, R. and Jahn, A. and Killge, S. and Werner, C.}
}