@conference{aufsatz44724,
    affiliation = {Professur für Mikrosystemtechnik},
    title = {Nano-patterned PZT films for perspective functional materials},
    journal = {International Symp Piezoresponse Force Microscopy and Nanoscale Phenomena in Polar Materials (ISAF/ECAPD/PFM), 2012 },
    keywords = {-},
    year = {2012},
    peerreview = {Nein},
    openaccess = {Nein},
    author = {Waegner, M. and Suchaneck, G. and Gerlach, G. and Eng, L.M. and Finn, A.}
}