@conference{aufsatz44725,
    affiliation = {Professur für Mikrosystemtechnik},
    title = {Cleaning Defects of Soft UV-Nanoimprint Molds for High Aspect-Ratio Features},
    journal = {56th Int. Conf. on Electron, Ion and Photon Beams (EIPBN 2012)},
    keywords = {-},
    year = {2012},
    peerreview = {Nein},
    openaccess = {Nein},
    author = {Finn, A. and Lu, B. and Kirchner, R. and Richter, K. and Fischer, W.-J.}
}