BibTex - Publikationen
@conference{aufsatz46373,
    affiliation = {Professur für Halbleitertechnik},
    title = {Detection of Water in Low-k Dielectric Film},
    journal = {EUFANET, Smart Failure Analysis for New Materials in Electronic Devices, 17.-18. September 2012, Dresden},
    keywords = {-},
    year = {2012},
    peerreview = {Nein},
    openaccess = {Nein},
    volume = {Vortrag},
    author = {Kubasch, C.}
}