@conference{aufsatz46373,
affiliation = {Professur für Halbleitertechnik},
title = {Detection of Water in Low-k Dielectric Film},
journal = {EUFANET, Smart Failure Analysis for New Materials in Electronic Devices, 17.-18. September 2012, Dresden},
keywords = {-},
year = {2012},
peerreview = {Nein},
openaccess = {Nein},
volume = {Vortrag},
author = {Kubasch, C.}
}