BibTex - Publikationen
@article{aufsatz46380,
    affiliation = {Professur für Halbleitertechnik},
    title = {Water uptake of a low-k dielectric film: Combining capacitance and gravimetric measurements},
    journal = {Microelectronic Engineering},
    keywords = {low-k film, Moisture uptake, Capacitance-time measurements, Gravimetric-measurements},
    pages = {177--181},
    year = {2013},
    peerreview = {Ja},
    openaccess = {Nein},
    volume = {106},
    doi = {http://dx.doi.org/10.1016/j.mee.2013.01.013},
    author = {Kubasch, C. and Bartha, J.W.}
}