@article{aufsatz46380,
affiliation = {Professur für Halbleitertechnik},
title = {Water uptake of a low-k dielectric film: Combining capacitance and gravimetric measurements},
journal = {Microelectronic Engineering},
keywords = {low-k film, Moisture uptake, Capacitance-time measurements, Gravimetric-measurements},
pages = {177--181},
year = {2013},
peerreview = {Ja},
openaccess = {Nein},
volume = {106},
doi = {http://dx.doi.org/10.1016/j.mee.2013.01.013},
author = {Kubasch, C. and Bartha, J.W.}
}