@article{aufsatz49742,
    affiliation = {Professur für Mikrosystemtechnik},
    title = {Molecular beam deposited zirconium dioxide as a hiph-k dielectric for future GaN based power devices},
    journal = {J. Vac. Sci. Technol. A31, 03C111 (2013)},
    keywords = {-},
    year = {2013},
    peerreview = {Ja},
    openaccess = {Nein},
    doi = {10.1116/1.4793764},
    author = {Freese, A. and Grube, M. and Wachowiak, A. and Geidel, M. and Adolphi, B.}
}