@conference{aufsatz49927,
    affiliation = {Professur für Mikrosystemtechnik},
    title = {Fabrication of Polymer Structures with Undercuts by Reverse Imprint Lithography},
    journal = {Proc. of the 57th Int. Conf. on Electron, Ion, and Photon Beam Technology and Nanofabrication EIPBN, Nashville, Tennessee, 2013},
    keywords = {-},
    year = {2013},
    peerreview = {Nein},
    openaccess = {Nein},
    author = {Finn, A. and Hensel, R. and Jahn, A. and Killge, S. and Werner, C. and Fischer, W.-J.}
}