@conference{aufsatz49928,
    affiliation = {Professur für Mikrosystemtechnik},
    title = {Stamp-and-Repeat UV Direct Patterning using Polymer Molds},
    journal = {10th Int. Workshop on High Aspect Ratio Micro and Nano System Technology (HARMNST 2013), Berlin, 2013},
    keywords = {-},
    year = {2013},
    peerreview = {Nein},
    openaccess = {Nein},
    author = {Finn, A. and Kirchner, R. and Landgraf, R. and Hiess, A. and Thrun, X. and Nüske, L. and Fischer, W.-J.}
}