@conference{aufsatz52993,
    affiliation = {Professur für Halbleitertechnik},
    title = {In-situ Growth Control für AlxTiyOz Films and Laminates},
    journal = {13th AVS conference on Atomic Layer Deposition, San Diego, CA, USA, 28.07.-31.07.2013},
    keywords = {ALD, QCM, SE, XPS, in-situ, Al2O3, TiO2, film growth, process integration},
    year = {2013},
    peerreview = {Nein},
    openaccess = {Nein},
    author = {Knaut, M. and Benner, F. and Hoßbach, C. and Geidel, M. and Dirnstorfer, I. and Albert, M. and Bartha, J.W.}
}