@conference{aufsatz53005,
affiliation = {Professur für Halbleitertechnik},
title = {Evaluation of a metal-organic precursor with regard to a gold ALD process by utilizing in-situ spectroscopic ellipsometry},
journal = {AVS 13th International Conference on Atomic Layer Deposition : July 28 – 31, 2013, San Diego, California, USA. San Diego, 2013 },
keywords = {-},
year = {2013},
peerreview = {Nein},
openaccess = {Nein},
volume = {Vortrag},
author = {Junige, M. and Schmidt, D. and Barry, Seán T. and Bartha, J.W. and Schubert, M.}
}