@conference{aufsatz53006,
    affiliation = {Professur für Halbleitertechnik},
    title = {Automated ALD precursor qualification},
    journal = {Semicon Europa 2013 : TechArena. Emerging Research Materials. Dresden, 08.10.-10.10.2013},
    keywords = {-},
    year = {2013},
    peerreview = {Nein},
    openaccess = {Nein},
    volume = {Vortrag},
    author = {Bartha, J.W. and Albert, M. and Junige, M. and Knaut, M.}
}