@conference{aufsatz53007,
    affiliation = {Professur für Halbleitertechnik},
    title = {Fabrication and optical modeling of nanohybrid functional slanted columnar thin films},
    journal = {6th International Conference on Spectroscopic Ellipsometry (ICSE-VI) : May 26-31, 2013 in Kyoto, Japan, 2013},
    keywords = {-},
    year = {2013},
    peerreview = {Nein},
    openaccess = {Nein},
    volume = {Vortrag},
    author = {Schmidt, D. and Junige, M. and Bartha, J.W. and Schubert, E. and Schubert, M.}
}