BibTex - Publikationen
@conference{aufsatz53497,
    affiliation = {Professur für Halbleitertechnik},
    title = {Adaptation of PECVD System for Very High Excitation Frequencies over 81.36 MHz},
    journal = {Proceedings of 28th European Photovoltaic Solar Energy Conference and Exhibition, Paris, Frankreich, 30.09.-04.10.2013},
    keywords = {-},
    pages = {2568--2572},
    year = {2013},
    peerreview = {Ja},
    openaccess = {Nein},
    author = {Leszczynska, B. and Strobel, C. and Leszczynski, S. and Albert, M. and Bartha, J.W. and Stephan, U. and Kuske, J.}
}