@conference{aufsatz53497,
affiliation = {Professur für Halbleitertechnik},
title = {Adaptation of PECVD System for Very High Excitation Frequencies over 81.36 MHz},
journal = {Proceedings of 28th European Photovoltaic Solar Energy Conference and Exhibition, Paris, Frankreich, 30.09.-04.10.2013},
keywords = {-},
pages = {2568--2572},
year = {2013},
peerreview = {Ja},
openaccess = {Nein},
author = {Leszczynska, B. and Strobel, C. and Leszczynski, S. and Albert, M. and Bartha, J.W. and Stephan, U. and Kuske, J.}
}