@conference{aufsatz53498,
    affiliation = {Professur für Halbleitertechnik},
    title = {In-Situ H2-Plasma Pretreatment and Amorphous Silicon Deposition for Heterojunction Solar Cells at Very High Plasma Excitation Frequency},
    journal = {Proceedings of 28th European Photovoltaic Solar Energy Conference and Exhibition, Paris, Frankreich, 30.09.-04.10.2013},
    keywords = {Heterojunction, PECVD, a -Si:H },
    pages = {1340--1343},
    isbn = {3-936338-33-7},
    year = {2013},
    peerreview = {Ja},
    openaccess = {Nein},
    doi = {10.4229/28thEUPVSEC2013-2BV.2.38},
    author = {Leszczynska, B. and Fischer, D. and Albert, M. and Bartha, J.W. and Jordan, P.M. and Simon, D.K. and Dirnstorfer, I. and Kuske, J.}
}