@article{aufsatz53515,
    affiliation = {Professur für Mikrosystemtechnik},
    title = {High aspect ratio pattern collapse of polymeric UV-nano-imprint molds due to cleaning},
    journal = {Microelectronic Engineering, 110},
    keywords = {-},
    pages = {112--118},
    issn = {0167-9317},
    year = {2013},
    peerreview = {Ja},
    openaccess = {Nein},
    doi = {doi: 10.1016/ j.mee.2013.02.065},
    author = {Finn, A. and Lu, B. and Kirchner, R. and Thrun, X. and Richter, K. and Fischer, W.-J.}
}