@conference{aufsatz53518,
    affiliation = {Professur für Mikrosystemtechnik},
    title = {Fabrication of Springtail Inspired Surface Features with Undercuts by Direct Replication},
    journal = {39th Int. Conf. on Micro and Nano Engineering 2013 (MNE 2013), London, United Kingdom},
    keywords = {-},
    year = {2013},
    peerreview = {Nein},
    openaccess = {Nein},
    author = {Finn, A. and Hensel, R. and Killge, S. and Werner, C. and Fischer, W.-J.}
}