@conference{aufsatz53519,
    affiliation = {Professur für Mikrosystemtechnik},
    title = {Sub-100 nm Channel Organic Field Effect Transistor fabricated by Wafer-Scale Nanoimprint Lithography with Polymer Templates},
    journal = {39th International Conference on Micro and Nano Engineering 2013, 16th-19th Sept. 2013 in London, UK},
    keywords = {-},
    year = {2013},
    peerreview = {Nein},
    openaccess = {Nein},
    author = {Teng, L. and Finn, A. and Plötner, M. and Hagemann, F. and Fischer, W.-J.}
}