@conference{aufsatz53674,
    affiliation = {Professur für Halbleitertechnik},
    title = {Influence of the Excitation Frequency Increase up to 140 MHz on the VHF-PECVD Technology},
    journal = {Proceedings of the COMSOL Conference, 23-25 October 2013, Rotterdam},
    keywords = {-},
    year = {2013},
    peerreview = {Ja},
    openaccess = {Nein},
    author = {Leszczynski, S. and Leszczynska, B. and Albert, M. and Bartha, J.W. and Stephan, U. and Kuske, J.}
}