@conference{aufsatz56835,
    affiliation = {Professur für Halbleitertechnik},
    title = {Flash-Lamp-Enhanced Atomic Layer Deposition of Thin Films},
    journal = {226th ECS-Meeting, Symposium P1 - Atomic Layer Deposition Applications 10, 5.-9. Oktober 2014, Cancun, Mexiko},
    keywords = {Flash Lamp Annealing, Atomic Layer Deposition},
    pages = {167--189},
    year = {2014},
    peerreview = {Ja},
    openaccess = {Nein},
    volume = {ECS Transactions 64 (9)},
    doi = {10.1149/06409.0167ecst},
    author = {Henke, T. and Knaut, M. and Hossbach, C. and Geidel, M. and Rebohle, L. and Albert, M. and Skorupa, W. and Bartha, J. W.}
}