@article{aufsatz56884,
affiliation = {Professur für Halbleitertechnik},
title = {Integration of molecular-layer-deposited aluminum alkoxide interlayers into inorganic nanolaminate barriers for encapsulation of organic electronics with improved stress resistance},
journal = {Journal of Vacuum Science & Technolgy A 01/2015},
keywords = {-},
year = {2015},
peerreview = {Ja},
openaccess = {Nein},
volume = {33},
number = {1},
doi = {DOI: 10.1116/1.4901232},
author = {Hossbach, C. and Nehm, F. and Singh, A. and Klumbies, H. and Fischer, D. and Richter, C. and Schroeder, U. and Albert, M. and Müller-Meskamp, L. and Leo, K. and Mikolajick, T. and Bartha, J. W.}
}