@article{aufsatz56884,
    affiliation = {Professur für Halbleitertechnik},
    title = {Integration of molecular-layer-deposited aluminum alkoxide interlayers into inorganic nanolaminate barriers for encapsulation of organic electronics with improved stress resistance},
    journal = {Journal of Vacuum Science & Technolgy A 01/2015},
    keywords = {-},
    year = {2015},
    peerreview = {Ja},
    openaccess = {Nein},
    volume = {33},
    number = {1},
    doi = {DOI: 10.1116/1.4901232},
    author = {Hossbach, C. and Nehm, F. and Singh, A. and Klumbies, H. and Fischer, D. and Richter, C. and Schroeder, U. and Albert, M. and Müller-Meskamp, L. and Leo, K. and Mikolajick, T. and Bartha, J. W.}
}