@conference{aufsatz56889,
    affiliation = {Professur für Halbleitertechnik},
    title = {Static and Dynamic VHF-Deposition of Microcrystalline Silicon at 140 MHz with Rates Up to 2.5 Nm/s},
    journal = {29th European Photovoltaic Solar Energy Conference and Exhibition, Amsterdam},
    keywords = {PECVD, Solar Cell, High Rate, Microcrystalline Silicon, Very High Frequency },
    pages = {1917--1920},
    isbn = {3-936338-34-5},
    year = {2014},
    peerreview = {Ja},
    openaccess = {Nein},
    doi = {DOI: 10.4229/EUPVSEC20142014-3DV.4.18},
    author = {Strobel, C. and Leszczynska, B. and Leszczynski, S- and Merkel, U. and Kuske, J. and Fischer, D. D. and Albert, M. and Holovský, J. and Bartha, J. W.}
}