@conference{aufsatz56890,
    affiliation = {Professur für Halbleitertechnik},
    title = {Progress in Spectroscopic Ellipsometry for the in-situ real-time investigation of Atomic Layer Depositions},
    journal = {8th Workshop Ellipsometry, Arbeitskreis Paul Drude e. V. in Dresden, 10.-12.03.2014},
    keywords = {-},
    year = {2014},
    peerreview = {Nein},
    openaccess = {Nein},
    volume = {Vortrag},
    doi = {DOI: 10.13140/2.1.4076.7689},
    author = {Junige, M. and Sharma, V. and Schmidt, D. and Albert, M. and Schubert, M. and Bartha, J. W.}
}