@conference{aufsatz56891,
    affiliation = {Professur für Halbleitertechnik},
    title = {Ta2O5 by thermal-activated ALD},
    journal = {Conference: DPG Frühjahrstagung Dresden, 30.03.-04.04.2014 },
    keywords = {-},
    year = {2014},
    peerreview = {Nein},
    openaccess = {Nein},
    volume = {Vortrag},
    author = {Junige, M. and Tanner, R. and Wenger, C. and Lupina, G. and Albert, M. and Bartha, J. W.}
}