@conference{aufsatz56892,
    affiliation = {Professur für Halbleitertechnik},
    title = {Growth kinetics and film properties of tantalum nitride ALD investigated by in-situ real-time ellipsometry and in-vacuo surface analysis},
    journal = {12th International Baltic ALD conference, At Helsinki, Finland, 12.-13.05.2014},
    keywords = {-},
    year = {2014},
    peerreview = {Nein},
    openaccess = {Nein},
    volume = {Vortrag},
    author = {Junige, M. and Walther, T. F. and Tanner, R. and Albert, M. and Bartha, J. W.}
}