BibTex - Publikationen
@conference{aufsatz56965,
    affiliation = {Professur für Halbleitertechnik},
    title = {Chemical-Mechanical Planarization of Aluminium Damascene Structures},
    journal = {ICPT 2012 International Conference on Planarization/CMP Technology, Grenoble, France, October 15-17},
    keywords = {-},
    year = {2012},
    peerreview = {Ja},
    openaccess = {Nein},
    author = {Künzelmann, K. and Müller, M. R. and Kallis, K. and Schütte, F. and Menzel, S. and Engels, S. and Fong, J. and Lin, C. and Dysard, J. and Bartha, J. W. and Knoch, J.}
}