@conference{aufsatz56967,
    affiliation = {Professur für Halbleitertechnik},
    title = {Morphological and Topological Effects during the CMP of Aluminium},
    journal = {LEVITRONIX Ultrapure User Conference 2013 and 29th European CMP Users Meeting Spring 2013, Zurich/Switzerland, April 11-12, 2013},
    keywords = {-},
    year = {2013},
    peerreview = {Ja},
    openaccess = {Nein},
    author = {Künzelmann, U. and Müller, M. R. and Menzel, S. and Lin, C. and Dysard, J. and Bartha, J. W. and Knoch, J.}
}