@conference{aufsatz56968,
    affiliation = {Professur für Halbleitertechnik},
    title = {Buried Triple-Gate Structures for InAs-Nanowire Field-Effect Transistor Devices},
    journal = {Materials Research Society (MRS) Fall Meeting & Exhibit 2013, Boston, Massachusetts, USA, December 1-6, 2013},
    keywords = {-},
    year = {2013},
    peerreview = {Ja},
    openaccess = {Nein},
    author = {Müller, M. R. and Ecik, E. and Haas, F. and Rieger, T.}
}