@conference{aufsatz56969,
    affiliation = {Professur für Halbleitertechnik},
    title = {Triple-Gate Structures for Advanced Field-Effect-Transistor Devices},
    journal = {39th International Conference on Micro and Nano Engineering (MNE 2013) London, GB, September 16-19, 2013 },
    keywords = {-},
    year = {2013},
    peerreview = {Ja},
    openaccess = {Nein},
    author = {Müller, M. R. and Gumprich, A. and Schütte, F. and Kallis, K. and Künzelmann, U. and Engels, S. and Stampfer, C. and Wilck, N. and Hadam, B. and Knoch, J.}
}