@conference{aufsatz56970,
    affiliation = {Professur für Halbleitertechnik},
    title = {Tackling Hillocks Growth after Aluminum CMP},
    journal = {ICPT 2014 International Conference on Planarization /CMP Technology, Kobe, Japan, November 19-21, 2014},
    keywords = {-},
    year = {2014},
    peerreview = {Ja},
    openaccess = {Nein},
    author = {Müller, M. R. and Künzelmann, U. and Menzel, S. and Petrov, I. and Kallis, K. and Knoch, J.}
}