@article{aufsatz57134,
    affiliation = {Professur für Halbleitertechnik},
    title = {A Flexible Research Reactor for Atomic Layer Deposition with a Sample-Transport Chamber for in Vacuo Analytics },
    journal = {American Journal of Nano Research and Application. Special Issue:Advanced Functional Materials},
    keywords = {Atomic Layer Deposition, Reactor Design, in Vacuo Sample Transport, UV Irradiation },
    pages = {34--38},
    year = {2014},
    peerreview = {Ja},
    openaccess = {Nein},
    volume = {2},
    number = {6-1},
    doi = {doi: 10.11648/j.nano.s.2014020601.15},
    author = {Sobottka, A. and Drößler, L. and Hossbach, C. and Abel, B. and Helmstedt, U.}
}