@conference{aufsatz57137,
    affiliation = {Professur für Halbleitertechnik},
    title = {Molecular Layer Deposition of Aluminum and Titanium Alkoxide for the Encapsulation of Flexible OLED Devices },
    journal = {Baltic Conference on Atomic Layer Deposition 2014 (BALD 2014), Helsinki, Finland; 05/2014 },
    keywords = {-},
    year = {2014},
    peerreview = {Ja},
    openaccess = {Nein},
    author = {Hossbach, C. and Fischer, D. and Schramm, T. and Albert, M. and Bartha, J. W. and Singh, A. and Richter, C. and Schröder, U. and Nehm, F. and Klumbies, H. and Müller-Meskamp, L.}
}