@article{aufsatz57143,
affiliation = {Professur für Halbleitertechnik},
title = {Investigation of Argon Plasma Damage on Ultra Low-κ Dielectrics},
journal = {ECS J. Solid State Sci. Technol. 2015},
keywords = {-},
pages = {N3023--N3028},
year = {2015},
peerreview = {Ja},
openaccess = {Nein},
volume = {4},
number = {1},
doi = {10.1149/2.0041501jss },
author = {Kubasch, C. and Olawumi, T. and Ruelke, H. and Mayer, U. and Bartha, J. W.}
}