@article{aufsatz57145,
    affiliation = {Professur für Halbleitertechnik},
    title = {Leakage Current and Breakthrough Measurements on Moisturized SiCOH},
    journal = {ECS J. Solid State Sci. Technol. 2015},
    keywords = {-},
    pages = {N3118--N3121},
    year = {2015},
    peerreview = {Ja},
    openaccess = {Nein},
    volume = {4},
    number = {1},
    doi = {10.1149/2.0161501jss },
    author = {Kubasch, C. and Ruelke, H. and Mayer, U. and Bartha, J. W.}
}