@article{aufsatz57157,
    affiliation = {Professur für Halbleitertechnik},
    title = {Deposition of intrinsic hydrogenated amorphous silicon for thin-film solar cells – a comparative study for layers grown statically by RF-PECVD and dynamically by VHF-PECVD},
    journal = {Progress in Photovoltaics Research and Applications (Impact Factor: 9.7.)},
    keywords = {dynamic deposition, VHF-PECVD, hydrogenated amorphous silicon, solar cells, degradation},
    year = {2014},
    peerreview = {Ja},
    openaccess = {Nein},
    volume = {22},
    number = {2},
    doi = {DOI: 10.1002/pip.2254},
    author = {Zimmermann, T. and Flikweert, A. J. and Merdzhanova, T. and Woerdenweber, J. and Gordijn, A. and Rau, U. and Stahr, F. and Dybek, K. and Bartha, J. W.}
}