@article{aufsatz57159,
    affiliation = {Professur für Halbleitertechnik},
    title = {Combining Short and Long Scale Effects in Modeling of Chemical-Mechanical Planarization},
    journal = {Journal of Chemical Science and Technology Jan. 2014},
    keywords = {Chip-scale Modeling; Simulation; Interaction; Pad Roughness; Pattern Influence},
    pages = {18--29},
    year = {2014},
    peerreview = {Ja},
    openaccess = {Nein},
    volume = {3},
    number = {1},
    author = {Bott, S. and Vasilev, B. and Rzehak, R. and Bartha, J. W.}
}