@conference{aufsatz5743,
affiliation = {Professur für Optoelektronische Bauelemente und Systeme},
title = {Micro optical devices for light modulation and deflection},
journal = {Mikrosystemtechnik Kongress 10.-12. Oktober 2005 in Freiburg},
pages = {179--182},
publisher = {VDE Verlag GmbH},
location = {Berlin Offenbach},
isbn = {978},
year = {2005},
peerreview = {Nein},
institution = {VDE},
author = {Schenk, H. and Sandner, T. and Lakner, H.}
}