@conference{aufsatz57709,
    affiliation = {Professur für Halbleitertechnik},
    title = {Development and Investigation of Thin Film Solar Cells on Flexible Substrates Using Very High Frequency Plasma Enhanced Chemical Vapor Deposition (VHF-PECVD) Technique},
    journal = {29th European Photovoltaic Solar Energy Conference and Exhibition, 3DV.4.24, Amsterdam, Netherlands, 22.09.-26.09.2014},
    keywords = {PECVD, Polymer Film, a-Si:H, Thin Film Solar Cell, Very High Frequency },
    pages = {1929--1932},
    isbn = {3-936338-34-5},
    year = {2014},
    peerreview = {Ja},
    openaccess = {Nein},
    doi = {10.4229/EUPVSEC20142014-3DV.4.24},
    author = {Fischer, D. D. and Leszczynska, B. and Albert, M. and Bartha, J. W. and Stephan, U. and Kuske, J. and Prager, N. and Fahland, M.}
}