@conference{aufsatz57821,
    affiliation = {Professur für Halbleitertechnik},
    title = {Deformations of soft imprint templates in the nanoimprint lithography},
    journal = {Proc. SPIE 8323, Alternative Lithographic Technologies IV, 83231B (March 1, 2012), Alternative Lithographic Technologies IV, San Jose, California, February 12, 2012},
    keywords = {Nanoimprint, soft imptint template, FEM, deformation},
    year = {2012},
    peerreview = {Ja},
    openaccess = {Ja},
    doi = {doi:10.1117/12.916287},
    author = {He, J. and Howitz, S. and Killge, S. and Richter, K. and Bartha, J. W.}
}