BibTex - Publikationen
    affiliation = {Professur für Halbleitertechnik},
    title = {High-Rate Deposition of Intrinsic a-Si:H and μc-Si:H Layers for Thin‑Film Silicon Solar Cells using a Dynamic Deposition Process},
    journal = {MRS Spring Meeting, 2012},
    keywords = {plasma-enhanced CVD (PECVD) (deposition), thin film, Si},
    year = {2012},
    peerreview = {Ja},
    openaccess = {Nein},
    volume = {1426 },
    doi = {},
    author = {Zimmermann, T. and Flikweert, A. J. and Merdzhanova, T. and Woerdenweber, J. and Gordijn, A. and Dybek, K. and Stahr, F. and Bartha, J. W.}