@article{aufsatz6094,
    affiliation = {Professur für Halbleitertechnik},
    title = {Investigation of a Ta–Si–O/Ta–Si–N bilayer system for embedded SAW finger structures},
    journal = {Microelectronic Engineering 82 (2005)},
    pages = {301--306},
    year = {2005},
    peerreview = {Nein},
    author = {Reitz, D. and Heuer, H. and Baunack, S. and Hübner, R. and Hoffmann, V. and Menzel, S. and Wenzel, C. and Wetzig, K.}
}