@article{aufsatz6116,
    affiliation = {Professur für Halbleitertechnik},
    title = {Characterisation of thin Ta-Si-Nx layers of different nitrogen content using XPS, UPS and STM},
    journal = {Applied Surface Science 252 (2005)},
    pages = {89--93},
    year = {2005},
    peerreview = {Nein},
    edition = {Neuerscheinung},
    author = {Zahn, W. and Hildebrand, D. and Menzel, S. and Oswald, S. and Heuer, H.}
}