@conference{aufsatz6127,
    affiliation = {Professur für Halbleitertechnik},
    title = {Industrial Precision Deposition for Microelectronics and Next Generation Hard Disk},
    journal = {SVC Publications 47th Technical Conference Proceedings},
    pages = {101--101},
    year = {2005},
    peerreview = {Nein},
    edition = {Neuerscheinung},
    author = {Berthold, J. and Hentsch, W. and Hilgers, H. and Schülke, T. and Siemroth, P. and Seifried, S. and Wenzel, C.}
}