@conference{aufsatz6129,
    affiliation = {Professur für Halbleitertechnik},
    title = {VHF Linear Plasma Source for Large Area Deposition of Amorphous and Multicrystalline Silicon Solar Cells},
    journal = {20th European Photovoltaic Solar Energy Conference and Exhibition, Barcelona, 6.-10.06.2005},
    year = {2005},
    peerreview = {Nein},
    edition = {Neuerscheinung},
    author = {Albert, M. and Terasa, R. and Kuske, J.}
}