@conference{aufsatz6130,
    affiliation = {Professur für Halbleitertechnik},
    title = {Hafnium Oxide for Optical Applications Deposited by Different CMOS Compatible Methods},
    journal = {Proceedings “Optics and Photonics” SPIE, San Diego, 30.07.-04.08.2005},
    year = {2005},
    peerreview = {Nein},
    edition = {Neuerscheinung},
    author = {Albert, M. and Adolphi, B. and Bartha, J. W. and Krüger, H. and Kunath, C. and Sorge, S.}
}